Capacitive pressure sensor inlaid a porous dielectric layer of superelastic polydimethylsiloxane in conductive fabrics for detection of human motions

Flexible, sensitive and largescale normal pressure sensors are in high demand of rapid development of healthcare and e-skin systems. In this paper, a new capacitive normal pressure sensor was fabricated based on a dielectric layer of superelastic polydimethylsiloxane (PDMS) with uniformly distributed micro-pores. The micro-pores were formed through vacuum-assisted infiltration of PDMS solution using sugar particles as porogen. Results showed...