Structural and hydrophilic properties of TiN films prepared by ultrasonic atomization assisted spray method under low temperature

An ultrasonic assisted spraying method was proposed to prepare TiN films in friendly conditions. The particle size effects of the nano-TiN suspensions upon the film structure, morphology, and optical properties were investigated. The results show that the larger particles (170 nm) form a porous structure, while the smaller ones (60 nm) form a dense structure. Both the films display good thermal stability under 700 °C vacuum annealing. The dense...