Design of a kinematic flexure mount for precision instruments based on stiffness characteristics of flexural pivot

Precision components in optical instruments enjoy the benefits of kinematic flexure mount, owing to its excellent performance evident in space telescope and lithography equipment. The stiffness behavior of a flexure mount is important for releasing thermal stress and resisting displacement. However, they still need enough investigation and design guidance. In this paper, a novel kinematic flexure mount comprising three identical chains, is...