Original paper
Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres
Abstract
Glass molding is widely used for manufacturing high-precision optical elements. Nitride coatings are recommended as protective coatings on glass molding dies. In a die-fixed glass molding system, the molding dies undergo rapid thermal shocks. In this study, near-amorphous Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings with a Si concentration of >14 at.% were prepared. The feasibility of these coatings in the glass molding process was evaluated through...
Paper Details
Title
Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres
Published Date
May 1, 2020
Volume
389
Pages
125662 - 125662
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Notes
History