Design, Analysis, and Control of a Two-Dimensional Vibration Device for Vibration-Assisted Micromilling

In this article, a new two-dimensional piezoelectric actuator driven vibration stage is proposed and prototyped. A double parallel four-bar linkage structure with double-layer flexible hinges is designed to guide the motion and reduce the displacement coupling effect between the two directions. The compliance modeling and dynamic analysis are carried out based on the matrix method and Lagrangian principle, and the results are verified by the...