Original paper
From 2D STXM to 3D Imaging: Soft X-ray Laminography of Thin Specimens
Abstract
X-ray tomography has become an indispensable tool for studying complex 3D interior structures with high spatial resolution. Three-dimensional imaging using soft X-rays offers powerful contrast mechanisms but has seen limited success with tomography due to the restrictions imposed by the much lower energy of the probe beam. The generalized geometry of laminography, characterized by a tilted axis of rotation, provides nm-scale 3D resolution for...
Paper Details
Title
From 2D STXM to 3D Imaging: Soft X-ray Laminography of Thin Specimens
Published Date
Jan 17, 2020
Journal
Volume
20
Issue
2
Pages
1305 - 1314
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Notes
History