doi.org/10.1016/j.pmatsci.2019.100636

A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine

..., Nicolas H. Voelcker
68
Progress in Materials Science40.00
Volume: 116, Pages: 100636 - 100636
Published: Dec 26, 2019
Paper Fields
Paper Details
Title
A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine
DOI
doi.org/10.1016/j.pmatsci.2019.100636
Published Date
Dec 26, 2019
Journal
Progress in Materials Science
Volume
116
Pages
100636 - 100636
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