Disturbance Observer Based Model Prediction Control for a 2-DOF Nanopositioning Stage

To compensate the nonlinear effects of a nanopositioning stage and its model uncertainties, this paper presents a composite controller by integrating disturbance observer (DOB) and model prediction control (MPC). The nonlinearity and dynamic cross-coupling effects are treated as unknown disturbances to the system, and a DOB is used to partially estimate and compensate the disturbance to improved performance. A MPC is commonly used to track a...