Electrical engineering

Microelectromechanical systems

Electronic circuit

Silicon photonics

Engineering

Hybrid silicon laser

Materials science

Photonics

Photonic integrated circuit

Electronic engineering

Computer science

Integrated circuit

Silicon

Integrated optics

Optoelectronics

IEEE Journal of Quantum Electronics

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.

MEMS-Enabled Silicon Photonic Integrated Devices and Circuits