Model reference adaptive damping control for a nanopositioning stage with load uncertainties.

Published on Apr 1, 2019in Review of Scientific Instruments1.523
· DOI :10.1063/1.5064722
Jie Ling10
Estimated H-index: 10
(WHU: Wuhan University),
Zhao Feng10
Estimated H-index: 10
(WHU: Wuhan University)
+ 1 AuthorsXiaohui Xiao12
Estimated H-index: 12
(WHU: Wuhan University)
Source
Abstract
In this paper, a scheme of model reference adaptive integral resonant control (MRAIRC) is presented for adaptive precision motion control of a piezo-actuated nanopositioning platform. The major advantage of the proposed scheme lies in the adaptivity for dynamic changes resulting from load uncertainties. Existing standard integral resonant control (IRC) with constant controller gains is normally designed based on the identified system model under no external load. For the proposed MRAIRC, a standard IRC is first designed using an analytical approach, assuming that a second-order system model is obtained in advance. Afterwards, the designed closed-loop is utilized as a reference model for systems with model uncertainties. The adaptive laws of the controller gains are determined according to the well-known MIT rules. An offline trail-and-error operation is conducted for adaption gains’ tuning. The stability of this adaptive control system is proved through Lyapunov stability analysis. Simulation and experimental studies demonstrate that the proposed MRAIRC is superior to the standard IRC in terms of the tracking errors for commonly used raster scanning signals at 5, 10, and 20 Hz with load variations of the platform ranging from 0 to 1000 g.In this paper, a scheme of model reference adaptive integral resonant control (MRAIRC) is presented for adaptive precision motion control of a piezo-actuated nanopositioning platform. The major advantage of the proposed scheme lies in the adaptivity for dynamic changes resulting from load uncertainties. Existing standard integral resonant control (IRC) with constant controller gains is normally designed based on the identified system model under no external load. For the proposed MRAIRC, a standard IRC is first designed using an analytical approach, assuming that a second-order system model is obtained in advance. Afterwards, the designed closed-loop is utilized as a reference model for systems with model uncertainties. The adaptive laws of the controller gains are determined according to the well-known MIT rules. An offline trail-and-error operation is conducted for adaption gains’ tuning. The stability of this adaptive control system is proved through Lyapunov stability analysis. Simulation and experime...
📖 Papers frequently viewed together
1991
3 Authors (S.K. Tso, ..., Heung-Yeung Shum)
2014
5 Authors (Steve Ulrich, ..., Itzhak Barkana)
References41
Newest
#1Min Ming (WHU: Wuhan University)H-Index: 8
#2Jie Ling (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
The inherent hysteresis nonlinearity of piezoelectric actuators seriously deteriorates the tracking performance of piezo-actuated nanopositioning stage, especially in large stroke applications. Usually, the model of piezo-actuated stage is given by cascading a rate-independent hysteresis submodel with a linear dynamics submodel. This paper develops a composite model predictive control (MPC) with feedforward hysteresis compensation based on the inverse multiplicative structure. The feedforward co...
Source
Flexure-based ultra-precision parallel mechanisms have inherent difference between input and actual output. Lost motion that stems from elasticity of flexure hinges in the parallel mechanism results in gain reduction of actuation. Therefore, static analysis is carried out by calculating directional stiffness and lost motions of actuation units, and is verified by finite element analysis (FEA). Dynamic analysis is performed based on modal analysis with linear mapping matrices to identify the dyna...
Source
#1Min Ming (WHU: Wuhan University)H-Index: 8
#2Zhao Feng (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
Piezoelectric actuators (PEAs) are widely applied in various nanopositioning equipment. However, the strong hysteresis nonlinearity compromises the positioning accuracy. In this work, a novel modified Bouc-Wen (MBW) model with a polynomial function of the differential of the input is established for modelling the hysteresis nonlinearity of the PEA-actuated nanopositioning stages. The particle swarm optimisation algorithm is adopted to identify the parameters of the MBW model with a set of input-...
Source
#1H. HabibullahH-Index: 5
#2Hemanshu R. Pota (UNSW: University of New South Wales)H-Index: 50
Last. Ian R. Petersen (ANU: Australian National University)H-Index: 75
view all 3 authors...
Source
#1Md. Sohel Rana (RUET: Rajshahi University of Engineering & Technology)H-Index: 13
#2Hemanshu R. Pota (UNSW: University of New South Wales)H-Index: 50
Last. Ian R. Petersen (ANU: Australian National University)H-Index: 75
view all 3 authors...
Source
#1Zhao Feng (WHU: Wuhan University)H-Index: 10
#2Jie Ling (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
In precise motion systems, feedforward controller is a key component for significant performance enhancement. However, traditional iterative learning control (ILC) works efficiently under strictly ...
Source
Jan 18, 2018 in ICRA (International Conference on Robotics and Automation)
#1Omar Aljanaideh (ASML: ASML Holding)H-Index: 10
#2Micky Rakotondrabe (Franche Comté Électronique Mécanique Thermique et Optique Sciences et Technologies)H-Index: 25
This paper introduces a dynamic observer in order to estimate the displacement in a 2-DOF piezoelectric actuator (piezoactuator) devoted to precise positioning and equipped with static self-measurement circuit. Then, the estimated displacement derived by the suggested observer is used as feedback for a robust H-inf controller. The 2-DOF piezoactuator is characterized by strong cross-couplings which are accounted for in the observer and in the feedback controller. Experimental results demonstrate...
Source
#1Jie Ling (WHU: Wuhan University)H-Index: 10
#2Zhao Feng (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
Conventionally, fixed-structure feedback controllers are designed by model-based approaches. However, such controllers are not necessarily ideal and optimal when connecting with the actual plant because of the existence of modeling uncertainty. In this paper, a paralleled damping controller as well as a novel hybrid reference model matching (RMM) and virtual reference feedback tuning (VRFT) approach for parameters’ tuning of the controller is presented. The composite damping controller for piezo...
Source
#1Linlin Li (SJTU: Shanghai Jiao Tong University)H-Index: 4
#2Chun-Xia Li (SJTU: Shanghai Jiao Tong University)H-Index: 10
Last. Li-Min Zhu (SJTU: Shanghai Jiao Tong University)H-Index: 41
view all 4 authors...
Abstract This paper proposes a new damping control approach with positive acceleration, velocity and position feedback (PAVPF) scheme for piezo-actuated nanopositioning stages to implement high-bandwidth operation. To achieve this objective, the intrinsic hysteresis nonlinearity of the piezoelectric actuator is firstly handled by a feedforward compensator with a modified Prandtl–Ishlinskii model. Afterwards, the PAVPF controller with the pole-placement method is implemented to suppress the light...
Source
#1Zhao Feng (WHU: Wuhan University)H-Index: 10
#2Jie Ling (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
Vibrations as well as cross-coupling effects severely hinder fast and accurate tracking for coupled parallel piezo nanopositioning stages. In this article, a data-based double-feedforward controller is proposed to reduce individual-axis repetitive errors and cross-coupling-caused errors simultaneously. The proposed approach utilizes modeling-free inversion-based iterative control to compensate repetitive errors and data-based feedforward decoupling controller to eliminate cross-coupling effect, ...
Source
Cited By6
Newest
#1Zhong Chen (SCUT: South China University of Technology)H-Index: 8
#2Xineng Zhong (SCUT: South China University of Technology)H-Index: 1
Last. Xianmin Zhang (SCUT: South China University of Technology)H-Index: 57
view all 4 authors...
Abstract null null Piezo-actuated nanopositioning stages, denoted as piezo-stages, have become more and more popular in high-speed and high-precision operation, such as high-speed scanning imaging in atomic force microscope (AFM), and stepping–scanning lithography based on wafer stages. But lightly damping dynamics largely limits motion control bandwidth and trajectory tracking performance of the piezo-stages after piezoelectric hysteresis has been well compensated, which makes the modal damping...
Source
#1Shi Jingzhuo (HAUST: Henan University of Science and Technology)H-Index: 6
#2Wenwen Huang (HAUST: Henan University of Science and Technology)H-Index: 1
Last. Zhao Liuqing (HAUST: Henan University of Science and Technology)
view all 3 authors...
MIT control strategy is a kind of model reference adaptive control method with the simplest structure. The reason why the structure is simple is that only the gain of the controlled object is adaptively adjusted. Because only the gain is adjusted, the ability of MIT control strategy to change the characteristics of the controlled object is limited. This also limits its application. In this paper, the simple idea of iterative learning control is introduced into MIT controller to increase the cont...
Source
#1Jie Ling (WHU: Wuhan University)H-Index: 10
#2Zhao Feng (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
High bandwidth and fast tracking of desired trajectories are eagerly required in various applications that use piezoelectric nanopositioning stages, especially in atomic force microscopes where the...
Source
#1Jie LingH-Index: 10
#2Zhao FengH-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 5 authors...
This paper proposes a new signal transformed internal model control (STIMC) scheme for non-raster scanning patterns of piezo-actuated nanopositioning stages. To smooth the scanning signals superimposed with a ramp or time-varying amplitudes, a signal transformation operator is calculated to convert the references into standard harmonic waveforms. An inverse transformation operator is then added in the control loop to generate the driving signals. For the contained internal model control (IMC) de...
Source
#1Min Ming (WHU: Wuhan University)H-Index: 8
#2Zhao Feng (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
Piezo-actuated micro-/nanopositioning systems have been widely employed in diverse high-precision positioning applications. However, the inherent hysteresis nonlinearity seriously deteriorates the ...
Source
#1Ling Jie (NUS: National University of Singapore)
#2Tingting Ye (WHU: Wuhan University)H-Index: 1
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 5 authors...
In this paper, a design procedure of damping controller for third-order nanopositioning stage is presented for high-speed triangular scanning. Conventionally, damping control schemes of integral resonant control (IRC) and resonance-shifted IRC (RS-IRC) are designed providing that a second-order model can be identified for a nanopositioning stage. For a third-order system, existing control schemes cannot be applied directly. For this, a pole-zero cancellation technique is presented to design IRC ...
Source
#1Min Ming (WHU: Wuhan University)H-Index: 8
#2Zhao Feng (WHU: Wuhan University)H-Index: 10
Last. Xiaohui Xiao (WHU: Wuhan University)H-Index: 12
view all 4 authors...
To compensate the nonlinear effects of a nanopositioning stage and its model uncertainties, this paper presents a composite controller by integrating disturbance observer (DOB) and model prediction control (MPC). The nonlinearity and dynamic cross-coupling effects are treated as unknown disturbances to the system, and a DOB is used to partially estimate and compensate the disturbance to improved performance. A MPC is commonly used to track a reference signal, which minimizes the steady-state tra...
Source
This website uses cookies.
We use cookies to improve your online experience. By continuing to use our website we assume you agree to the placement of these cookies.
To learn more, you can find in our Privacy Policy.