Experimental study on chemical mechanical polishing of chalcogenide glasses
Abstract
Chalcogenide glasses (Ge10As40Se50) are one of the core components of the athermalized infrared optical system. Because of material properties, its processability is limited, and surface defects are difficult to control. The chemical nature of Ge10As40Se50 has been established, which can react with sodium hydroxide and hydrogen peroxide (H2O2). In this paper, experimental studies are further carried out to investigate the effect of...
Paper Details
Title
Experimental study on chemical mechanical polishing of chalcogenide glasses
Published Date
Mar 6, 2019
Journal
Volume
58
Issue
8
Pages
1950 - 1950
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Notes
History