Integrated Modified Repetitive Control With Disturbance Observer of Piezoelectric Nanopositioning Stages for High-Speed and Precision Motion

The tracking performance of piezoelectric nanopositioning stages is vital in many applications, such as scanning probe microscopes (SPMs). Although modified repetitive control (MRC) can improve tracking performance for commonly used periodic reference input, it is sensitive to unexpected disturbances that deteriorate tracking precision, especially for high-speed motion. In order to achieve high-speed and precision motion, in this paper, a new...