Experimental investigation on size-dependent higher-mode vibration of cantilever microbeams

Published on Aug 1, 2019in Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems1.737
· DOI :10.1007/S00542-018-4244-0
Zhenkun Li10
Estimated H-index: 10
(HUST: Huazhong University of Science and Technology),
Yuming He23
Estimated H-index: 23
(HUST: Huazhong University of Science and Technology)
+ 3 AuthorsDabiao Liu20
Estimated H-index: 20
(HUST: Huazhong University of Science and Technology)
Sources
Abstract
A new perspective is presented to study size-dependent elasticity experimentally within micron scale utilizing dynamic approach. The size-dependent vibration of cantilever microbeams made of nickel is studied for the first three transverse modes. The normalized natural frequency of the first mode manifests strong size effect as reported. Remarkably, the normalized natural frequencies of the second and third mode also increase to 1.9 times as the thickness of microbeams decreases from 15 to 2.1 μm. Similarly the normalized bending rigidity increases to about 3.5 times. It is the first time that elastic size effect is observed in vibration of higher modes. Moreover, the size-dependent vibration of the first mode is interpreted in light of the modified couple stress theory, and the theoretical prediction also fit the experimental results of high modes very well. Hence it is confirmed that modified couple stress theory is valid for vibration of higher modes too.
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