A Model Prediction Control Design for Inverse Multiplicative Structure Based Feedforward Hysteresis Compensation of a Piezo Nanopositioning Stage

The inherent hysteresis nonlinearity of piezoelectric actuators seriously deteriorates the tracking performance of piezo-actuated nanopositioning stage, especially in large stroke applications. Usually, the model of piezo-actuated stage is given by cascading a rate-independent hysteresis submodel with a linear dynamics submodel. This paper develops a composite model predictive control (MPC) with feedforward hysteresis compensation based on the...