Spectral line

Modal

Voltage

Engineering

Materials science

Chromatography

Relative humidity

Range (aeronautics)

Humidity

Electrical impedance

Overtone

Gravimetric analysis

Thermodynamics

Physics

Nanotechnology

Organic chemistry

Astronomy

Geography

Torr

Electronic engineering

Remote sensing

Composite material

Sensitivity (control systems)

Analytical Chemistry (journal)

Water vapor

Chemistry

Meteorology

Detection limit

Optoelectronics

Electrical engineering

Nanoscale

Gravimetric, direct-current electrical, and electrical impedance sensing modes were used to measure response of high surface area 2D Ti3C2 MXene film to water vapor pressures spanning 3 orders of magnitude (20 mTorr-20 Torr). The Ti3C2 film exhibited reproducible reversible response in 0.1%-95% relative humidity (RH) range with a detection limit of <20 mTorr H2O partial pressure (<0.1% RH). DC electrical current-based sensing with 3 mV operating voltage and 0.8 pW power consumption was demonstrated. The highest normalized sensitivity was shown for gravimetric sensing modalities which scale with the overtone number, reaching highest sensitivity of about 12 Hz/% RH at the 9th crystal overtone (45 MHz oscillation).

Multi-modal, ultrasensitive, wide-range humidity sensing with Ti<sub>3</sub>C<sub>2</sub> film

Multi-modal, ultrasensitive, wide-range humidity sensing with Ti3C2 film

Multi-modal, ultrasensitive, wide-range humidity sensing with Ti₃C₂ film