Hysteresis modelling and feedforward compensation of piezoelectric nanopositioning stage with a modified Bouc‐Wen model

Piezoelectric actuators (PEAs) are widely applied in various nanopositioning equipment. However, the strong hysteresis nonlinearity compromises the positioning accuracy. In this work, a novel modified Bouc-Wen (MBW) model with a polynomial function of the differential of the input is established for modelling the hysteresis nonlinearity of the PEA-actuated nanopositioning stages. The particle swarm optimisation algorithm is adopted to identify...