Stress analysis of film-on-substrate structure under tensile loads

In this study, the internal stress distribution of a film on substrate structure (FOSS) under tensile loads has been analyzed. Based on force balance principles, analytical solutions are deduced to solve the elastic problem for the FOSS considering the mismatch of mechanical parameters between the film layer and the substrate. The stress distributions of both monolayer FOSS and multilayer FOSS are determined. The effect of the influencing...