3D numerical simulation of free surface shape during the crystal growth of floating zone (FZ) silicon

Volume: 483, Pages: 269 - 274
Published: Feb 1, 2018
Abstract
In FZ growth processes, the stability of the free surface is important in the production of single crystal silicon with high quality. To investigate the shape of the free surface in the FZ silicon crystal growth, a 3D numerical model that included gas and liquid phases was developed. In this present study, 3D Young-Laplacian equations have been solved using the Volume of Fluid (VOF) Model. Using this new model, we predicted the 3D shape of the...
Paper Details
Title
3D numerical simulation of free surface shape during the crystal growth of floating zone (FZ) silicon
Published Date
Feb 1, 2018
Volume
483
Pages
269 - 274
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