Dynamics of Microbeams under Multi-Frequency Excitations

This paper presents an investigation of the dynamics of microbeams under multiple harmonic electrostatic excitation frequencies. First, the response of a cantilever microbeam to two alternating current (AC) source excitation is examined. We show by simulations the response of the microbeam at primary resonance (near the fundamental natural frequency) and at secondary resonances (near half, superharmonic, and twice, subharmonic, the fundamental...