Recovery behavior of thermoplastic polymers in micro hot embossing process

A series of experiments were carried out to investigate polymer recovery in the micro hot embossing process. Above the glass transition temperature (Tg), polymer deformation becomes much easier and complete filling of microcavities is generally not difficult to achieve. One of the problems restricting replication efficiency of the hot embossing technique is polymer recovery. After complete filling, if without timely cooling, large recovery may...