Thermoelastic damping in micro- and nanomechanical beam resonators considering size effects

In this paper, we describe governing equations for modified coupled thermoelasticity in micro- and nanomechanical beam resonators, which can treat the effects of size by taking the relaxation time, the phonon mean-free path and the material length scale parameter into account. An analytical model of thermoelastic damping is derived using the complex-frequency approach. Numerical results of thermoelastic damping calculated using the proposed...