Thermoelastic damping in micro- and nanomechanical beam resonators considering size effects

Volume: 103, Pages: 783 - 790
Published: Dec 1, 2016
Abstract
In this paper, we describe governing equations for modified coupled thermoelasticity in micro- and nanomechanical beam resonators, which can treat the effects of size by taking the relaxation time, the phonon mean-free path and the material length scale parameter into account. An analytical model of thermoelastic damping is derived using the complex-frequency approach. Numerical results of thermoelastic damping calculated using the proposed...
Paper Details
Title
Thermoelastic damping in micro- and nanomechanical beam resonators considering size effects
Published Date
Dec 1, 2016
Volume
103
Pages
783 - 790
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