Sensor Array based on Metal Oxide Semiconductors for Detecting Gas Mixtures and Its Sensing Properties

Metal oxide semiconductor (MOS) gas sensors are very attractive owing to their low cost simplicity of use, large number of detectable gases and various potential application fields. However, the MOS gas sensor has a serious shortcoming of low selectivity in a mixture of gases, In this study MOS micro gas sensors were fabricated for detecting carbon monoxide (CO), nitrogen oxide (NO2), ammonia (NH3) and formaldehyde (HCHO) gases, as well as their...