The Mechanism of Excimer Laser-Induced Amorphization of Ultra-Thin Si Films

To better understand the involved phase transformation mechanism, we are studying the excimer laser-induced amorphization (ELA) of ultra-thin Si films on oxidized Si substrates. In this paper, we show that the onset of amorphization of hydrogen-free Si films on SiO2 substrates upon increases in the energy density is associated with the onset of complete melting of the film. Once complete melting occurs, further increases in the incident energy...