A modified positive velocity and position feedback scheme with delay compensation for improved nanopositioning performance

This paper presents a controller design to compensate the effects of time delay in a flexure-based piezoelectric stack driven nanopositioner. The effects of the time delay in flexure nanopositioners is illustrated and identified by means of experimentally obtaining the frequency response of the system. Moreover, a theoretical model which takes into account the dependence between the sampling time and the delay introduced is proposed. The...