Design of a nonlinear damping control scheme for nanopositioning
Published: Jul 1, 2013
Abstract
The application of a nonlinear control law for vibration damping on a typical nanopositioning system is investigated. The nonlinear control law is an augmentation of the linear integral force feedback scheme, where the constant gain used in integral force feedback, is replaced by a passive nonlinear operator. The nonlinear control law improves the performance of integral force feedback as it provides more rapid suppression of large disturbances,...
Paper Details
Title
Design of a nonlinear damping control scheme for nanopositioning
Published Date
Jul 1, 2013
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