Vertically aligned carbon nanotubes grown by plasma enhanced chemical vapor deposition

Plasma enhanced chemical vapor deposition, which enables growth of carbon nanotubes directly onto substrates, is potentially suitable for preparing carbon nanotubes as electron sources in field emission displays. In this article, we report the growth of aligned carbon nanotubes by microwave plasma enhanced chemical vapor deposition and investigate the effect of various parameters on the growth. Comparison among three catalysts (Fe, Co, and Ni)...