Nanopositioning With Multiple Sensors: A Case Study in Data Storage

The use of multiple sensors for nanopositioning is well motivated in high-density data-storage devices, such as probe-based data storage devices. In these devices, ultra-high positioning accuracies are desired over their lifetime in the presence of external disturbances. In addition to meeting the stringent requirements for nanopositioning, the use of multiple sensors lends itself for performing sensor fusion and obtaining reliable estimates of...