High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories
Abstract
A novel scan trajectory for high-speed scanning probe microscopy is presented in which the probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by actuating the scanner with two single-tone harmonic waveforms of constant frequency and amplitude. Owing to the extremely narrow frequency spectrum, high imaging speeds can be achieved without exciting the unwanted resonant modes of the scanner and without increasing...
Paper Details
Title
High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories
Published Date
Apr 20, 2012
Journal
Volume
23
Issue
18
Pages
185501 - 185501
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