Chemical inertness of Ta–Si–N coatings in glass molding

Glass molding can be employed to fabricate high-quality lenses with a lower cost and higher process rate than those of the traditional glass lens production method. Glass molding is widely employed in manufacturing precision optical elements with aspheric surfaces. In this study, amorphous Ta–Si–N coatings with a Ti interlayer were sputtered on cemented carbide substrates to evaluate their potential as protective coatings on glass molding dies....