Microstructure, mechanical and tribological properties of TaCN composite films

Tantalum and carbon nitride films, with varied power of the carbon target were synthesised by multi-target magnetron sputtering. The microstructure, mechanical and tribological properties of TaCN films were investigated by X-ray diffraction, Fourier transform infrared spectroscopy, atomic force microscopy, scanning electron microscopy, nano-indentation, nano-scratch, and a high temperature ball-on-disc tribometer. X-ray diffraction reveals that...