Multivariable Negative-Imaginary Controller Design for Damping and Cross Coupling Reduction of Nanopositioners: A Reference Model Matching Approach

This paper presents the design and experimental implementation of a novel multi-input multi-output (MIMO) control structure using two negative-imaginary damping controllers to damp the first resonant mode and attenuate cross coupling effects between the axes of a piezoelectric tube scanner. The dynamics of the scanner in the lateral and longitudinal axes are identified from measured data and the design of the controller using a MIMO framework is...