Computer hardware

Voltage

Engineering

Non-volatile memory

Oxide

Metallurgy

Materials science

Embedded system

Operating system

Resistive touchscreen

Computer science

High-κ dielectric

Ferroelectricity

Ferroelectric RAM

Flash memory

Random access memory

Nanotechnology

Dielectric

Hafnium

Neuromorphic engineering

Zirconium

Resistive random-access memory

Artificial neural network

Optoelectronics

Machine learning

Electrical engineering

Engineering physics

Small

Hafnium oxide (HfO2 ) is one of the mature high-k dielectrics that has been standing strong in the memory arena over the last two decades. Its dielectric properties have been researched rigorously for the development of flash memory devices. In this review, the application of HfO2 in two main emerging nonvolatile memory technologies is surveyed, namely resistive random access memory and ferroelectric memory. How the properties of HfO2 equip the former to achieve superlative performance with high-speed reliable switching, excellent endurance, and retention is discussed. The parameters to control HfO2 domains are further discussed, which can unleash the ferroelectric properties in memory applications. Finally, the prospect of HfO2 materials in emerging applications, such as high-density memory and neuromorphic devices are examined, and the various challenges of HfO2 -based resistive random access memory and ferroelectric memory devices are addressed with a future outlook.

Hafnium Oxide (HfO<sub>2</sub>) – A Multifunctional Oxide: A Review on the Prospect and Challenges of Hafnium Oxide in Resistive Switching and Ferroelectric Memories

Hafnium Oxide (HfO2) – A Multifunctional Oxide: A Review on the Prospect and Challenges of Hafnium Oxide in Resistive Switching and Ferroelectric Memories

Hafnium Oxide (HfO₂) – A Multifunctional Oxide: A Review on the Prospect and Challenges of Hafnium Oxide in Resistive Switching and Ferroelectric Memories