On-chip optical levitation with a metalens in vacuum

Optical levitation of dielectric particles in vacuum is a powerful technique for precision measurements, testing fundamental physics, and quantum information science. Conventional optical tweezers require bulky optical components for trapping and detection. Here we design and fabricate an ultrathin dielectric metalens with a high numerical aperture of 0.88 at 1064 nm in vacuum. It consists of 500 nm-thick silicon nano-antennas, which are...