High-bandwidth nanopositioning via active control of system resonance

Volume: 16, Issue: 2, Pages: 331 - 339
Published: Mar 5, 2021
Abstract
Typically, the achievable positioning bandwidth for piezo-actuated nanopositioners is severely limited by the first, lightly-damped resonance. To overcome this issue, a variety of open- and closed-loop control techniques that commonly combine damping and tracking actions, have been reported in literature. However, in almost all these cases, the achievable closed-loop bandwidth is still limited by the original open-loop resonant frequency of the...
Paper Details
Title
High-bandwidth nanopositioning via active control of system resonance
Published Date
Mar 5, 2021
Volume
16
Issue
2
Pages
331 - 339
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