Physics

Cleanroom

Meteorology

Automotive engineering

Nanotechnology

Mathematics

Airflow

Air conditioning

Statistics

Filtration (mathematics)

Engineering

Ventilation (architecture)

Room air distribution

Materials science

Environmental science

Waste management

Mechanical engineering

Environmental engineering

Energy and Buildings

The air-conditioning system in modern industrial cleanrooms can be very energy intensive due to large air change rates per hour and high airflow resis…

Performance analysis and improvement of air filtration and ventilation process in semiconductor clean air-conditioning system