Topmetal-M: A novel pixel sensor for compact tracking applications

The Topmetal-M is a large area pixel sensor (18 mm × 23 mm) prototype fabricated in a new 130 nm high-resistivity CMOS process in 2019. It contains 400 rows × 512 columns square pixels with the pitch of 40μm. In Topmetal-M, a novel charge collection method combining the Monolithic Active Pixel Sensor (MAPS) and the Topmetal sensor has been proposed for the first time. Both the ionized charge deposited by the particle in the sensor and along the...