Engineering

Materials science

Profilometer

Surface finish

Systems engineering

Computer science

Surface metrology

Metrology

Surface (topology)

Current (fluid)

Mechanical engineering

Physics

Nanotechnology

Mathematics

Optics

Focus (optics)

Geometry

Electrical engineering

Journal of the Optical Society of America A

This paper reviews recent developments of non-contact three-dimensional (3D) surface metrology using an active structured optical probe. We focus primarily on those active non-contact 3D surface measurement techniques that could be applicable to the manufacturing industry. We discuss principles of each technology, and its advantageous characteristics as well as limitations. Towards the end, we discuss our perspectives on the current technological challenges in designing and implementing these methods in practical applications.

State-of-the-art active optical techniques for three-dimensional surface metrology: a review [Invited]