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Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

The performance and calibration of an XPS instrument can change with time. Changes may be gradual so that users may not notice them from day to day unless they actively compare the current performance of the instrument with its recently optimized performance. This publication describes a method by which such a comparison may be made very rapidly. A tool, based on a Microsoft Excel workbook, has been made available to assist in the comparison and to highlight aspects of an instrument's performance which might have changed significantly. The whole procedure is rapid, minimizing the impact on both instrument availability and user time. This means that it may be followed frequently without significantly affecting laboratory throughput.

Procedure which allows the performance and calibration of an XPS instrument to be checked rapidly and frequently