doi.org/10.2174/2405520413999200517124810
Original paper

Amorphous-to-Nanocrystalline Transition in Silicon Thin Films by Hydrogen Diluted Silane Using PE-CVD Method

Ashok Jadhavar
10
,Vidya Doiphode
12
,Sandesh Jadkar
33
Recent Innovations in Chemical Engineering (Formerly Recent Patents on Chemical Engineering)
Published: Feb 1, 2021
Paper Fields
Paper Details
Title
Amorphous-to-Nanocrystalline Transition in Silicon Thin Films by Hydrogen Diluted Silane Using PE-CVD Method
DOI
doi.org/10.2174/2405520413999200517124810
Published Date
Feb 1, 2021
Journal
Recent Innovations in Chemical Engineering (Formerly Recent Patents on Chemical Engineering)
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