Thermal conductivity and interfacial effect of parylene C thin film using the 3-omega method

Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, we are interested in its thermal properties, and in particular the thermal conductivity of thin films. This later is determined by the so-called three-omega method. This technique makes use of a thin conducting strip, in...