doi.org/10.1016/j.actamat.2020.02.046

The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen

..., Tomáš Polcar
41
Acta Materialia9.30
Volume: 188, Pages: 609 - 622
Published: Feb 25, 2020
Paper Fields
Paper Details
Title
The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen
DOI
doi.org/10.1016/j.actamat.2020.02.046
Published Date
Feb 25, 2020
Journal
Acta Materialia
Volume
188
Pages
609 - 622
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