Damping Controller Design for Triangular Scanning of a Third-Order Nanopositioning Stage

In this paper, a design procedure of damping controller for third-order nanopositioning stage is presented for high-speed triangular scanning. Conventionally, damping control schemes of integral resonant control (IRC) and resonance-shifted IRC (RS-IRC) are designed providing that a second-order model can be identified for a nanopositioning stage. For a third-order system, existing control schemes cannot be applied directly. For this, a pole-zero...