Trench

Metal

Supercritical carbon dioxide

Sediment

Composite number

Engineering

Metallurgy

Materials science

Electroless deposition

Deposition (geology)

Layer (electronics)

Aspect ratio (aeronautics)

Carbon fibers

Chemical engineering

Geology

Supercritical fluid

Paleontology

Nanotechnology

Organic chemistry

Composite material

Analytical Chemistry (journal)

Chemistry

Chemical deposition

Wetting

Carbon dioxide

Copper

This work reports filling of blind-hole, high aspect ratio (AR) nano trenches by NiP electroless deposition (ELD) enabled under supercritical carbon dioxide (SC-CO 2 ). SC-CO 2 ELD effectively filled blind trenches with AR ≤ 1:60 (diameter: 83 nm, depth: 5 μm), which was twice higher compared to that achieved by conventional ELD under similar experimental conditions. No pre-deposition of seed layers or surface pre-treatment to increase wettability was performed, and trench filling was achieved only through application of SC-CO 2 . Moreover, P content in the nanowires was found to vary according to nano trench aspect ratio.

High Aspect Ratio via Filling by Electroless Deposition Enabled by Supercritical Carbon Dioxide