A 2-DOF Monolithic Compliant Rotation Platform Driven by Piezoelectric Actuators

To realize high-precision rotation angle adjustment in micro-/nanomanipulation, a novel monolithic two-degrees-of-freedom (2-DOF) pure rotation platform is designed, fabricated, and tested in this article. The rotation platform is driven by two piezoelectric actuators. Rotation decoupling is realized based on three Hooke's joints, and a large rotation range is obtained based on two bridge-type mechanisms. Compared with other rotation platforms,...