High-Speed AFM Imaging of Nanopositioning Stages Using H$_{\infty }$ and Iterative Learning Control

This paper presents a method that combines a robust controller (H _∞ ) and an iterative learning controller (ILC) to control a low mechanical bandwidth nanopositioning stage for high-speed atomic force microscopy imaging. In conventional scanning configurations, the imaging speed of a low-resonance frequency scanner is limited to a few Hz....