Linguistics

Philosophy

Transmission electron microscopy

Materials science

Embedded system

Nuclear magnetic resonance

Multislice

Computer science

Semiconductor

Physics

Nanotechnology

Optics

Atom (system on chip)

Focus (optics)

Scanning transmission electron microscopy

Atom probe

Composition (language)

Optoelectronics

Ultramicroscopy

This paper presents a comprehensive investigation of an extended method to determine composition of materials by scanning transmission electron microscopy (STEM) high angle annular darkfield (HAADF) images and using complementary multislice simulations. The main point is to understand the theoretical capabilities of the algorithm and address the intrinsic limitations of using STEM HAADF intensities for composition determination. A special focus is the potential of the method regarding single-atom accuracy. All-important experimental parameters are included into the multislice simulations to ensure the best possible fit between simulation and experiment. To demonstrate the capabilities of the extended method, results for three different technical important semiconductor samples are presented. Overall the method shows a high lateral resolution combined with a high accuracy towards single-atom accuracy.

Composition determination of semiconductor alloys towards atomic accuracy by HAADF-STEM