Original paper
Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
Volume: 16, Issue: 2, Pages: 908 - 918
Published: Oct 31, 2018
Abstract
This paper presents the design of a new compact one-degree-of-freedom (1-DOF) compliant stage driven by a piezoelectric actuator (PEA) for micro/nanopositioning in the vertical direction. An orthogonal compound bridge-type amplifier is introduced to amplify the displacement of the PEA. It significantly reduces the height of the stage and leads to a compact design. By analytical modeling of the mechanism, the design variables are determined,...
Paper Details
Title
Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
Published Date
Oct 31, 2018
Volume
16
Issue
2
Pages
908 - 918