High-Precision Tracking of Piezoelectric Actuator Using Iterative Learning Control and Direct Inverse Compensation of Hysteresis

Rate-dependent hysteretic nonlinearity, which is an inherent characteristic of piezoelectric actuators (PEAs), causes a significant challenge in precise motion control of piezoelectric nanopositioning stages. In this paper, by assuming that the model of PEA takes a Hammerstein structure, a novel control strategy that combines iterative learning control (ILC) and the direct inverse of hysteresis is proposed to compensate for both nonlinearities...