Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range
Volume: 61, Issue: 2, Pages: 893 - 903
Published: Feb 1, 2014
Abstract
This paper presents the design and development of a novel flexure parallel-kinematics precision positioning stage with a centimeter range and compact dimension. The stage mechanism is devised using leaf flexures to achieve a decoupled and modular structure. Structural parameters are carefully designed to guarantee the range, stiffness, resonant frequency, and payload capabilities in consideration of manufacturing tolerance. The parametric design...
Paper Details
Title
Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range
Published Date
Feb 1, 2014
Volume
61
Issue
2
Pages
893 - 903
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