Electrical resistivity and conductivity

Engineering

Chemical physics

Materials science

Power (physics)

Electrostatic force microscope

Electrostatics

Physical chemistry

Thermodynamics

Physics

Electrostatic interaction

Condensed matter physics

Composite material

Chemistry

Electric potential energy

Electrical engineering

Cantilever

Japanese Journal of Applied Physics

Alumina electrostatic chucks having various electrical resistivities were fabricated by changing the amount of TiO 2 and heat treatment conditions. Experimental data on electrostatic force and its response time were obtained for the fabricated electrostatic chucks. The experimental results are compared with the theoretically predicted results utilizing the equivalent circuit model, and the relationship between electrical resistivity and electrostatic force characteristics is discussed.

Relationship between Electrical Resistivity and Electrostatic Force of Alumina Electrostatic Chuck